Siemens SLI-5310 Betriebsanleitung Seite 22

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Linear encoders for linear drives
General information
Selection criteria for linear encoders
HEIDENHAIN recommends the use of
exposed linear encoders whenever the
severity of contamination inherent in a
particular machine environment does not
preclude the use of optical measuring
systems, and if relatively high accuracy is
desired, e.g. for high-precision machine
tools and measuring equipment, or for
production, testing and inspecting
equipment in the semiconductor industry.
Particularly for applications on machine
tools that release coolants and lubricants,
HEIDENHAIN recommends sealed linear
encoders. Here the requirements on the
mounting surface and on machine guide-
way accuracy are less stringent than for ex-
posed linear encoders, and therefore instal-
lation is faster.
Speed stability
To ensure smooth-running servo
performance, the linear encoder must
permit a resolution commensurate with
the given speed control range:
On handling equipment, resolutions in
the range of several microns are
suffi cient.
Feed drives for machine tools need
resolutions of 0.1 μm and fi ner.
Production equipment in the
semiconductor industry requires
resolutions of a few nanometers.
At low traversing speeds, the position
error within one signal period has a
decisive infl uence on the speed stability of
linear motors. (See also Measuring
Accuracy.)
Traversing speeds
Exposed linear encoders function without
contact between the scanning head and
the scale. The maximum permissible
traversing speed is limited only by the
cutoff frequency (–3 dB) of the output
signals.
On sealed linear encoders, the scanning
unit is guided along the scale on a ball
bearing. Sealing lips protect the scale and
scanning unit from contamination. The ball
bearing and sealing lips permit mechanical
traversing speeds up to 180 m/min.
Signal period and resulting measuring step as a function of the subdivision
factor
Subdivision factor
Signal period [μm]
f
Measuring step [μm]
f
Antriebsgeber_en_2013.indd 22 12.11.2013 06:54:09
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